DMSE 線
設備主要特點/Features：
1、水刀采用分水設計，便于出水均勻。
Water knife with water distribution design to make evenness jetting.
2、高溫段采用SUS316金屬齒輪，其使用壽命可達到10年左右。
SUS316 metal gear is used in high-temp module with ten years long service life.
3、高溫段使用電磁流量計，從而保證流量穩定。
Electromagnetic flowmeter is used in high-temp module to ensure stable flow.
4、Permanganate段安裝再生系統，延長藥水壽命。
Renewable system is installed in Permanganate module thus to extend the service life of the medicine.
工藝流程/Schematic：
入板→Sweller→止水洗→沖污水→HF水洗(1)(2)(3)→清水入→檢查(1)→Permanganate(1)(2)→回收水洗→HF水洗(4)(5)(6)→DI
水入→檢查(2)→Neutralizer→沖污水→水刀洗(1)(2)(3)→HF水洗(7)→DI水入→整孔→水刀洗(4)(5)→HF水洗(8)(9)→DI水入→出板→氧化→水刀洗(6)(7)(8)→HF水洗(10)→DI水入→催化→水刀洗(9)(10)(11)→HF水洗(11)→DI水入→干板組合→出板
Input→Sweller→Cycle Water Rinse→HF Rinse1,2,3→Fresh Water In→Inspection1→Permanganate(1)(2)→Reclaimed water Rinse
→HF Rinse4,5,6→DI Water In→Inspection2→Neutralizer→Waste Water Rinse→Flood Bar Rinse1,2,3→HF Rinse7→DI Water In
→Hole condition→Flood Bar Rinse4,5→HF Rinse8,9→DI Water In→Output→Oxidize→Flood Bar Rinse6,7,8→HF Rinse10→DI
Water In→Catalyze→Flood Bar Rinse9,10,11→HF Rinse11→DI Water In→Drying Module→Output
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